Development of Soft X-ray Microanalysis using Windowless SDD Technology
نویسندگان
چکیده
New instrumentation which is sensitive to the detection of ultra low energy (<100eV) X-rays [1,2], promises new analysis capability for the SEM; so called ‘Soft X-ray Microanalysis’. Only those soft X-rays that are generated close to the surface of the sample escape and therefore they offer potential for surface and higher spatial resolution analysis. The detectability of very low energy K, L and M lines also add useful chemical information when operating SEMs at very low accelerating voltage (2kV or less).
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